화학공학소재연구정보센터
학회 한국재료학회
학술대회 2019년 봄 (05/15 ~ 05/17, 평창 알펜시아 리조트)
권호 25권 1호
발표분야 G. 나노/박막 재료 분과
제목 Characteristics of High Accelerating Heat Films on Wide-Stretchable Polymer Substrates
초록 High Accelerating Heat Films on wide-stretchable polymer as free curved Films was prepared by linear plasma chemical vapor deposition (LPCVD). Under plasma environment, the wide-stretchable heat (WSH) films were fabricated by supplying tetra-methyl tin (TMT) as precursors for tin, Tricarbon-hexafluoride (C3F6) as precursor for fluorine atoms, IHF-G01 film (Security Product Code) as heat layer for thermal element, oxygen and hydrogen as reaction gases in Roll to Roll deposition systems. The result shows that the WSH films have nanocrystalline structure with a grain size of 30-60 nm, a thickness of under 100 nm and transmittance over 85 %. The observed lowest sheet resistance of 250 ohm/sq. was found in our experimental range. We conclude that the optimum content of hybrid material and metal seed layer plays an important role to affect the structural, electrical, optical, free bending and thermal properties of the accelerating heat films as wide-stretchable Heater.
저자 Seung-Yeon Lee1, Seong-Hwan Lim2, Yeojo Yoon3, Jaekyun Kim4, Hyunduk Kho1, Ji Hun Park2
소속 1Advanced Materials Group, 2R&D Center, 3IM Co., 4Ltd.
키워드 Wide-stretchable Heater; Accelerating Heat Films; LPCVD; Sensor
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