초록 |
Polyimide thin films were prepared by plasma polymerization from a number of monomers such as 4,4’-(hexafluoroisopropylidene)diphthalic anhydride(6FDA) and 4,4’-oxydianiline(ODA) with RF plasma (pulsed and continuous). Plasma polymerization was carried out by varying conditions such as plasma power, treatment time and internal pressure, and in pulsed plasma polymerization, duty cycle was also varied. The prepared polymer films were heat treated and then subjected to characterization by FT-IR, DSC and TGA. Solubility as well as optical properties were also evaluated. |