| 학회 | 한국고분자학회 |
| 학술대회 | 2003년 봄 (04/11 ~ 04/12, 연세대학교) |
| 권호 | 28권 1호, p.76 |
| 발표분야 | 특별 심포지엄 |
| 제목 | Preparation of Polyimide Thin Films via Plasma Polymerization and their characterization |
| 초록 | Polyimide thin films were prepared via RF plasma polymerization with 3,3’-diaminodiphenyl sulfone (mDDS), phthalic anhydride (PA), and/or pyromellitic dianhydride (PMDA). Vapor deposition polymerization was also attempted for comparison. The conditions were optimized as a function of plasma power, time and monomer ratio. The prepared thin films were heat treated in convection oven at 300°C for 1hr, and characterized by a-Step, DSC, TGA, AFM and FT-IR. Solubility, conductivity, and dielectric constant were also evaluated. In FT-IR analysis, poly(amic-acid)’s characteristic peaks were detected in plasma polymerized film of PA + mDDS as well as vapor deposition polymerized film of PMDA+mDDS, but were not observed in the plasma polymerized films with one monomer. Upon that heat treatment, the poly(amic-acid)’s characteristic peaks were not detected but polyimide’s characteristic peaks were shown. |
| 저자 | 강현민;윤태호 |
| 소속 | Kwangju Institute of Science and Technology;Kwangju Institute of Science and Technology |
| 키워드 | Polyimide thin film; plasma polymerization; vapor deposition polymerization |
