| 학회 | 한국재료학회 |
| 학술대회 | 2009년 가을 (11/05 ~ 11/06, 포항공과대학교) |
| 권호 | 15권 2호 |
| 발표분야 | B. Nanomaterilas Technology(나노소재 기술) |
| 제목 | A Nano-indenter Based Method for Characterization of Contact Reliability in RF-MEMS Switch |
| 초록 | Radio-Frequency (RF) Microelectromechanical system (MEMS) switches have become the promising devices due to their advantages such as higher off-impedance, lower insertion loss, and low power consumption. However, RF-MEMS switches are limited by increase in electrical contact resistance due to arc-induced contamination during the break contacts as the current passes. Thus, it is important to study the inhibition of surface contamination in RF-MEMS switch contact. In this study, we have investigated the contact reliability of RF-MEMS switches using a modified nano-indenter to simulate DC switching and measured the contact resistance. Experiments were performed using precisely controlled external high current source and contact force via nano-indenter, in order to study the effect of electric current, contact force and different contact materials such as Au, Au-Pt, and multilayered Au-Pt on the contact resistance. The investigation on the reliability of contact resistance in different alloys, levels of current flow and contact forces will be discussed in detail. |
| 저자 | Dong-Seok Kim1, Seung-Deok Ko2, Byung-Kee Lee3, Jun-Bo Yoon2, Do Kyung Kim3 |
| 소속 | 1Department of Materials Science and Engineering, 2KAIST, 3Department of Electrical Engineering |
| 키워드 | RF-MEMS; Switch; Contact Reliability; Nano-indenter |
