| 초록 |
Nanofabrication is an inevitable process in nanoscience and nanotechnology. Compared to conventional photolithography, unconventional lithographic techniques have drawn attention for cost effective, reliable process. However, these techniques are limited in scalability due to relatively time-consuming processes. To challenge this issue, here we suggest a simple yet robust strategy for realizing a high precision temperature controlled rigiflex mold directly amenable to printing process with high resolution and site-specific accuracy. The surface temperature of the mold controlled by localized joule-heating could be perfectly and uniformly tuned over a large surface area (20 mm x 10 mm). This work can offer a highly precise spatial controllability for patterning on specific regions, and it also shows a great potential for large area pattering and hierarchical structuring readily using step-and-repeat processes. |
