화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2007년 가을 (11/02 ~ 11/03, 한경대학교)
권호 11권 2호
발표분야 정밀화학
제목 Multi-encoded Rugate Porous Silicon Interferometer as Nerve Agents Sensors
초록 In recent years, porous silicon (PSi) multiplayer structures are widely used Si-based optoelectronics which exhibit interesting optical and electrical properties. Triply encoded multiple rugate structures can be etched on a silicon wafer, showing three sharp spectral lines in the optical reflectivity spectrum. All of the individual sine components are summed together to create a composite waveform which can be converted to an analog current-time waveform to etch using a computer-controlled digital galvanostat. A waveform containing three separate frequency components has been applied.
저자 손홍래, 정경선, 조성동
소속 조선대
키워드 Multi-encode; Rugate porous silicon; Nerve agents; Sensing
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