| 학회 |
한국재료학회 |
| 학술대회 |
2020년 가을 (11/18 ~ 11/20, 휘닉스 제주 섭지코지) |
| 권호 |
26권 1호 |
| 발표분야 |
A. 전자/반도체 재료 분과 |
| 제목 |
Catalytic Properties of MnO2 and CuO alloys being used for gas purifying process |
| 초록 |
Properties of two types of MnO2 and CuO alloys were identified which have different element composition. These catalysts are used in gas purification process to manufacture over 9N ultra-pure inert gas for semiconductor process application. Optical microscope and SEM were used to analyze shape and microstructure of the MnO2 and CuO alloy. EDS characterization was used to examine composition. Moreover, BET analysis was progressed to check surface area of the MnO2 and CuO alloy. Finally, TPO and Pulse Titration analysis were progressed to check catalytic property of the MnO2 and CuO alloy. |
| 저자 |
진새라, 임예솔, 이현준, 김성훈, 노윤영
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| 소속 |
원익홀딩스 |
| 키워드 |
Catalyst; MnO2; CuO; Gas Purifying
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| E-Mail |
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