| 학회 |
한국재료학회 |
| 학술대회 |
2013년 봄 (05/23 ~ 05/24, 여수 엠블호텔(THE MVL)) |
| 권호 |
19권 1호 |
| 발표분야 |
B. 나노재료(Nanomaterials) |
| 제목 |
Facile generation of silica nanotubes using porous Si process and wet chemical oxidation at room temperature |
| 초록 |
Porous Si (p-Si) has been actively studied for various applications, in particular for light emission, during the last decades. Among various methods to fabricate p-Si, catalytic chemical etching has been renewed in connection with the development of metal-assisted chemical etching of Si. Sinking metal nanoparticles generate deep and tortuous pores in Si during catalytic chemical etching. The pore generation process has been found to be accompanied by the generation of nanoporous layer around the pores. Wet chemical oxidation of the nanoporous layer into SiO2, combined with KOH etch removal of non-oxidized Si ligaments has led to the generation of silica nanotubes, with controllable inner/outer diameter and length of tubes. Systematic experimental results and relevant discussion will be presented. |
| 저자 |
Sung-Soo Yoon1, Dahl-Young Khang2
|
| 소속 |
1Yonsei Univ., 2department of materials science and engineering |
| 키워드 |
Silica nanotubes; Wet chemical oxidation; Porous Si
|
| E-Mail |
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