| 학회 |
한국재료학회 |
| 학술대회 |
2015년 봄 (05/14 ~ 05/15, 구미코) |
| 권호 |
21권 1호 |
| 발표분야 |
G. 나노/박막 재료 |
| 제목 |
Direct visualization of etching trajectories in metal-assisted chemical etching of Si by chemical oxidation of porous sidewalls |
| 초록 |
A facile way to visualize the trajectories of Ag/Au nanoparticles in Si through the silica nanotubes (SNTs) and their network has been demonstrated. Porous Si was generated by the well-known metal-assisted chemical etching (MaCE) method. The porosification of Si by the MaCE has been accompanied by the formation of nanoporous Si layer around pores. Ensuing room-temperature wet chemical oxidation by dipping in AgNO3 or HNO3 solution has successfully converted the nanoporous layer into seamless silica layer, due to volume expansion during the oxidation. Final alkali-hydroxide etch removal of un-oxidized Si has led to the formation of SNTs network. This SNTs structure is completly replicated from the trajectories of Ag/Au nanoparticles in Si. Detailed mechanisms involved in these process steps have been elucidated by systematic investigations. |
| 저자 |
Sung-Soo Yoon, Dahl-Young Khang
|
| 소속 |
연세대 |
| 키워드 |
Porous silicon; chemical oxidation; silica nanotubes
|
| E-Mail |
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