화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2012년 봄 (04/25 ~ 04/27, 제주 ICC)
권호 18권 1호, p.1032
발표분야 재료
제목 Stoichiometric and Interfacial Assessment of BaxSr1-xTiO3 (x=0, 0.50, 1.0)/p-Si(110) Heterojunction Devices
초록 A common wet chemical process is optimized to produce BaxSr1-xTiO3 (x=0, 0.50, 1.0) thin films on p-Si (110) substrates, resulting in cubic SrTiO3, Ba0.5Sr0.5TiO3 and tetragonal BaTiO3 in O2 ambient conditions (100 sccm) at 700 °C. Through X-ray diffractometer (XRD) and X-ray photoelectron spectroscopy (XPS) characterizations the crystallographic phase and band alignment of BaxSr1-xTiO3/Si(110) were studied. A simplest Ag/BaxSr1-xTiO3/Si(110)/Ag and Al/BaxSr1-xTiO3/Si(110)/Pt device structure was assembled to study the deep and shallow levels via capacitance-voltage (C-V) features. Substantial hysteresis (V) was observed for Ba0.5Sr0.5TiO3  and BaTiO3. The observed shift in the binding energy of the core level spectra and the difference in V were explained in the light of band off-set, chemical environment and probable interfacial defect states.
저자 Soumen Das, Vallivedu Janardhanam, Liu Daan, 한윤봉
소속 전북대
키워드 BaxSr1-xTiO3 thin films; Heterojunction device; Interfacial behavior
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