| 학회 |
한국고분자학회 |
| 학술대회 |
2008년 가을 (10/09 ~ 10/10, 일산킨텍스) |
| 권호 |
33권 2호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Synthesis and Characterization of Derivatives of Poly(p-xylylene) Copolymer for Microelectronic Applications |
| 초록 |
Low dielectric constant insulating polymers have recently attracted a great deal of research interest owing to the critical need to decrease the RC delay time, cross-talk and power dissipation in the new generation of high frequency integrated circuits. Such applications require new class of polymers with a combination of properties: high thermal stability (degradation temperature (Td) ＞ 400 oC), low water uptake (＜1%), high glass transition temperature (Tg) ＞180 oC, dielectric constant less than 2.8, dielectric loss tan δ ＜ 0.002, and thermosetting properties. These stringent requirements could not be satisfied by existing polymers. In order to meet such requirements, we prepared a thermally crosslinkable p-xylylene copolymer through Gilch type polymerization. It shows a high thermal stability up to 400 oC and relatively low dielectric constant of 2.8 at 1GHz. The solubility, mechanical, optical and dielectric properties of the cured copolymer films were investigated in details. |
| 저자 |
Syamkumar V. Mulpuri1, Micheal Bognitzki2, Andreas Greiner3, 윤도영4
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| 소속 |
1Department of Chemistry, 2Seoul National Univ., 3Philipps-Universitt Marburg, 4Germany |
| 키워드 |
low dielectric constant; micro electronics; Poly(p-xylylene)
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| E-Mail |
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