| 학회 |
한국공업화학회 |
| 학술대회 |
2007년 봄 (05/11 ~ 05/12, 계명대학교) |
| 권호 |
11권 1호 |
| 발표분야 |
정보전자소재 |
| 제목 |
Characteristics of the facing target sputtered transparent conducting oxide thin films for the top emission of OLED |
| 초록 |
Transparent conducting oxides(TCO) thin films of high quality on organic layer are of paramount importance for the development of top emission structure of OLED. A successful TCO thin film deposition method for this purpose is the facing target sputtering(FTS) technology. Hence, the Sn-doped In2O3(ITO) thin films have been fabricated by the FTS method, and their characteristics have been investigated. The experimental results suggest that the ITO films with good qualities can be grown by FTS method. |
| 저자 |
이도경, 이성호, 김영태, 오지훈
|
| 소속 |
전자부품(연) |
| 키워드 |
OLED; ITO thin films; facing target sputtering
|
| E-Mail |
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