화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2014년 가을 (10/22 ~ 10/24, 대전 DCC)
권호 20권 2호, p.2246
발표분야 촉매 및 반응공학
제목 Effect of pretreatment on conversion of Silicon tetrachloride (STC) to trichlorosilane (TCS) over carbon catalysts
초록 In most of Silicon solar cells companies, researchers and R & D groups are recently devoted their researches for the reduction of Polysilicon production cost. Recycle process and polysilicon from trichlorosilane (TCS) are realized as alternative way to reduce the polysiliocon production cost. In the present study, various pretreatments of ordered mesoporous carbon (OMC) catalyst were carried out in presence of O2, steam, HCl, and NH3 at 300oC for the high conversion of STC to TCS. It was found that the steam pretreated OMC catalyst at 300oC showed the higher conversion rate than those of the O2, HCl and NH3 pretreated OMC.
저자 곽도환, 양오봉, 이진우, M. Shaheer Akhtar
소속 전북대
키워드 Silicon tetrachloride; trichlorosilane; catalysts; ordered mesoporous carbon
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