| 초록 |
We studied the effect of elastomeric stamp deformation by thermal deformation in capillary force lithography. During heating, the stamp is deformed with thermal expansion and affect to the polymer thin film. And through the similar way, thermal contraction affect to the polymer film during cooling. In crystalline polymer, effect of contraction is dominant because they are very fluidic above Tm and it is observed by OM and AFM. But the amorphous polymer is still stick even above Tg and the polymer film influenced by both expansion and contraction. The cooling rate is important for in this case. All these effects are weaken when the polymer film is thick sufficiently but it is important because the elastomeric stamp is deformed always when it heated or cooled |
