화학공학소재연구정보센터
학회 한국재료학회
학술대회 2019년 봄 (05/15 ~ 05/17, 평창 알펜시아 리조트)
권호 25권 1호
발표분야 A. 전자/반도체 재료 분과
제목 The dielectric properties of PZ-PT-BZN ternary solid system thick films by aerosol deposition
초록 Ferro-/piezoelectric perovskites have been widely investigated as functional elements for a variety of applications. The best example is lead zirconate titanate PZT solid solution system. The compound has their compositions across the morphotropic phase boundary (MPB). It is well known that the addition of Bi(Zn2/3Nb1/3)O3 broadens the MPB region of PZT binary system. This study is mainly focused on a compound 0.95[(1-x)PbZrO3-xPbTiO3]-0.05Bi(Zn2/3Nb1/3)O3 to fabricate thick films by aerosol-deposition (AD) process. The AD method can fabricate films through the collision of fine ceramic powder particles onto substrate. By using the AD method, the PZT-BZN films revealed nano-size grain and dense structure at the room temperature. The crystallinity AD PZT-BZN thick films was enhanced by annealing at 450, 550 and 650℃ for 2h. Enhanced dielectric properties are found in the ternary solid solution system compared with pure PZT ceramics.
저자 지성엽, 정대용
소속 인하대
키워드 PZ-PT; BZN; ternary solid system; dielectric; aerosol deposition
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