| 학회 |
한국고분자학회 |
| 학술대회 |
2015년 가을 (10/06 ~ 10/08, 대구컨벤션센터(EXCO)) |
| 권호 |
40권 2호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Optimization of barrier structure using PEALD and Top Coating |
| 초록 |
For flexible display applications, flexibility and barrier properties to water vapor and oxygen transport are highly required for plastic substrates. Barrier coating by PEALD process enhanced the barrier properties to some extent, but saturation behavior was observed with further increase of layer thickness by PEALD process. It is expected that organic top coating with high aspect ratio nanomaterials could still enhance the barrier properties of the inorganic layer formed by PEALD process. Organic top coating could also solve the problems in brittle nature of inorganic layers and protect the inorganic layer during the handling processes afterwards. High degree of encapsulation and flexibility by forming organic-inorganic coating layers were attempted in this work by employing Al2O3/ZrO2 multilayer deposition PEALD process followed by organic wet coating process with several nanomaterials with great aspect ratios. |
| 저자 |
김성수1, 김현기2, 김해숙2, 라하나2, 은지혜1
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| 소속 |
1경희대, 2Regional Innovation Center |
| 키워드 |
PEALD; Clay; Top coating; WVTR
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| E-Mail |
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