초록 |
Soft materials have been widely studied for bottom-up lithography. Among soft materials, supramolecules have advantages of small feature size (2-10 nm), fast construction time (~ few min) and various chemical functionalities compared to others. By these reasons, supramolecules can be utilized for promising applications such as organic opto-electronic devices. Here we use tapered shape dendrimers, which are self-assembled to the cylindrical structure. We form homeotropic alignment of derndrimers by PVA top coating and thermal annealing. Additional etching steps, vertical aligned structures are obtained with thin films (~ 30nm). Immersing films onto metal precursors, we obtained uniformly thin films of cylindrical structures with core size 1.5 – 2 nm that containing metal ions. Our result show steps for fabricating ultra-dense nanostructures using well-aligned cylindrical supramolecular structures, which can give potentials to improve bottom-up lithography based on dendrimer materials. |