| 초록 |
Micro/nano particles are typically used in optoelectronic and quantum devices, catalysts, and biomedical materials. In general, these particles exist in the liquid and/or solid state. This has limited the development of new functional devices and materials using these particles. Therefore, new technology to control the number and size of particles, and to fix at an arbitrary point on the substrate is required. We have already developed the fabrication technique for a mesoscopic Si roll. This roll is formed on an Si substrate, and can be used to prepare tubes that typically fix powder particles. In this study, Si tubes were fabricated to capture micro/nano particles. The tubes were prepared by anodizing an Si wafer using HF solution (HF + C2H5OH + H2O). The starting material was p-type, (100) and single-crystalline Si wafer (of resistivity ρ = 5-20 Ω·cm). For anodization, a vertical single tank cell and Pt cathode were used. The anode material was Si. The HF concentration was 10 ppm in volume. Si, TiO2, and Ag particles were added to the solution before anodization. For surface observation, a field-emission scanning electron microscope (FE-SEM; JSM-7100, JEOL) was used. The elemental composition was analyzed by a energy dispersive spectroscope (EDS; JED-2300, JEOL). The length and diameter of the tube were 30 m and 1 m, respectively. It was confirmed that there were particles (Si, TiO2, and Ag powders) in the tubes. The particle size was about 0.1-1.5 μm. In addition, the formation mechanism of the tube with particles was discussed. In future work, we plan to investigate control of the number and size of the particles. |
