| 초록 |
Sol-gel method seems to be a promising candidate for the preparation of low-loss optical waveguide. However, the presence of OH of Si-OH groups in final gel materials is the major factor for optical losses at 1550 nm due to non-condensed OH groups originating from the sol-gel process at low temperature. Therefore, organic-inorganic hybrid sol-gel process is applied to reduce the concentration OH group in organic modified silicate (ORMOSIL) precursor such as 3-GLycidoxypropyltrimethoxysilane (GLYMO) or 3-Trimethoxysilylpropylmethacrylate (TMSPM) at low temperature. In addition, chelating modified titanium alkoxide is used to vary refractive indexes in channel waveguide. Those of precursors are favourable for fabricating waveguide by soft-lithography. Their structural and optical properties are analyzed by Near-Infrared, IR, and UV-Vis spectroscopy, Prism Coupler, SEM and AFM. |
