| 학회 |
한국재료학회 |
| 학술대회 |
2019년 가을 (10/30 ~ 11/01, 삼척 쏠비치 호텔&리조트) |
| 권호 |
25권 2호 |
| 발표분야 |
G. 나노/박막 재료 분과 |
| 제목 |
Ultraviolet-ozone treatment on MoS2 monolayers: chemical-vapor-deposited thin films vs. single crystals |
| 초록 |
We report the different oxidation behavior between polycrystalline chemical-vapor-deposited and mechanically-exfoliated single crystal MoS2 monolayers by ultraviolet-ozone treatment. As ultraviolet-ozone treatment time increased from 0 to 5 minutes, photoluminescence emission and Raman modes of both MoS2 disappeared, suggesting structural degradation by oxidation. Analysis with optical absorbance and x-ray photoelectron spectroscopy suggested the formation of MoO3 in both MoS2 after ultraviolet-ozone treatment. In addition, ultraviolet-ozone treatment possibly led to the formation of oxygen vacancies, molybdenum oxysulfide, or molybdenum sulfates in chemical-vapor-deposited MoS2. The measurement of electrical resistance after ultraviolet-ozone treatment suggested the transformation of chemical-vapor-deposited MoS2 into doped MoO3 and of mechanically-exfoliated MoS2 into negligibly-doped MoO3. These results demonstrate that the crystallinity of monolayer MoS2 can strongly influence the effect of ultraviolet-ozone treatment, providing important implications on the device integration of MoS2 and other two-dimensional semiconductors. |
| 저자 |
Changki Jung1, Hae In Yang2, Minji Kang1, Woong Choi2
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| 소속 |
1School of Materials Science & Engineering, 2Kookmin Univ. |
| 키워드 |
MoS<SUB>2</SUB>; CVD; monolayer; UV-ozone
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| E-Mail |
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