화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2022년 봄 (04/06 ~ 04/08, 대전컨벤션센터)
권호 47권 1호
발표분야 분자전자 부문위원회
제목 Parylene-based polymeric dielectric top-gate organic field-effect transistors exposed to a UV/ozone environment
초록 Organic field-effect transistors (OFETs) structured with a top-gate configuration have several advantages, such as better charge-carrier injection, easy gate line designing, and encapsulation or protection of devices, over those configured with a bottom-gate architecture. In particular, Poly (para-xylylene) (Parylene) -based polymer and its derivatives are considered suitable insulating materials for these transistors, due to thin film formation through a low-temperature vapor deposition process, superior barrier properties, and excellent dielectric characteristics. In this study, we analyzed two types of Parylene dielectrics (Parylene-C and Parylene -AF) considering their thin film formation process, surface, insulating, and OFET operation characteristics. Furthermore, we investigated the durability of the top-gate based OFETs composed of two polymer dielectrics while it was exposed to a UV/ozone environment.
저자 엽하경, 김세현
소속 영남대
키워드 parylene-c parylene-F Top Gate
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