| 초록 |
An ultra-high sensitive pressure sensor based on porous pyramid dielectric layer is reported. Compared to that of the solid pyramid dielectric layer, the sensitivity was drastically increased to 44.5 kPa-1 in the pressure range ＜100 Pa, an unprecedented sensitivity for capacitive pressure sensors. The enhanced sensitivity is attributed to lowered compressive modulus and larger change in effective dielectric constant under pressure. By placing the pressure sensors on islands of hard elastomer embedded in soft elastomer substrate, the sensors exhibited insensitivity to strain. The pressure sensors were also non-responsive to temperature. |
