| 학회 |
한국고분자학회 |
| 학술대회 |
2007년 가을 (10/11 ~ 10/12, 일산킨텍스) |
| 권호 |
32권 2호 |
| 발표분야 |
고분자 구조 및 물성 |
| 제목 |
Process for Developing Decal Transfer Lithography: Introduction of Reusable PDMS-Coated Nanoscale Stamp |
| 초록 |
In this study, we were able to promote the capability of conventional DTL. The procedure used in this study was inspired by traditional DTL techniques, but a conventional PDMS stamp was alternated with a nanometer scale stamp coated with a thin film of PDMS. The mold was prepared using UV curable polymer, pentaerythritol propoxylater triacrylate (PPT), which is harder than PDMS. High-resolution nanostructure transfer is not easily realized in PDMS mold, which is generally employed in DTL, due to its inherent softness. Whereas UV-cured polymer (PPT) can be used to fabricate the nanostructured mold with high feature-fidelity because its hardness. Consequently, we obtained nano-scale mold, which were covered with PDMS for DTL process. Owing to PDMS thin layer coating strategy, we were able to promote the traditional DTL. First, we succeeded in progressing towards a DTL process that extends to the nanometer scale. Second, we were able to empower the DTL stamp to be used several times. |
| 저자 |
김미희, 김영호, 이민정, 최추지, 김주희, 조민경, 전은선, 김연상
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| 소속 |
이화여대 |
| 키워드 |
Unconventional Lithography; Decal transfer lithography
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| E-Mail |
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