화학공학소재연구정보센터
학회 한국재료학회
학술대회 2006년 봄 (05/19 ~ 05/20, 경상대학교 )
권호 12권 1호
발표분야 나노 및 생체재료
제목 Growth of ordered Ni nanorod arrays on Ti/Si substrate using anodized aluminum oxide templates via electroplating
초록 The electro-deposition is the simple method that can be applied to fabricate nanostructured metal particles on a large area substrate. The anodic alumium oxide(AAO) is useful template to make ordered metallic nanowires. The AAO was formed on the Si substrates to apply the metallic nanowires to the nanodevices. The Ti layer was inserted between AAO and Si substrate to prevent from reaction between Si and Al and to increase the electrical conductivity of substrate. The AAO template was fabricated with Al directly deposited on Ti/p-Si by sputter. And it was prepared using two step anodic oxidation process in aqueous solution of 0.3 M oxalic acid and pore-widening process in aqueous solution of 0.1 M phosphoric acid. Ni nanorod were deposited on AAO template with varying the growth condition; solution temperature, applied potential, and growth time. The effects of three parameters on the morphology of Ni nanorod was measured by FE-SEM and XRD.


This research was performed with the financial support of the Center for Nanostructured Materials Technology (M105KO010023-05K1501-02410), grant No R01-2004-10104-0 from ministry of science & technology.
저자 Se Young Jeong1, Yousuk Cho2, Yangsub Kim1, Heeyong Park2, Dojin Kim1
소속 1Department of Material Science & Engineering, 2Chungnam National Univ.
키워드 Ni nanorod; electroplating; AAO
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