| 학회 | 한국화학공학회 |
| 학술대회 | 2010년 봄 (04/22 ~ 04/23, 대구 EXCO) |
| 권호 | 16권 1호, p.727 |
| 발표분야 | 재료 |
| 제목 | Growth of High Aspect-Ratio Anodic Aluminum Oxide Templates on Silicon |
| 초록 | Porous alumina templates with high aspect-ratio ordered nanopores were fabricated by controlling anodizing progress of Al films on Si substrates in sulfuric acid solution. An AAO template having pores of average diameter 40nm and height 500nm was successfully prepared by two-step anodic oxidation of an aluminum film on a silicon substrate. The ordering of nanopore arrangement with a hexagonal symmetry was found to be closely related to thickness of the deposited Al film, growth temperature, applied voltage, and solution concentration. We have obtained silicon-wafer scale AAO templates of ordered arrays with easy handing, and this kind of template can be expected to have applications in nanoelectronics and optoelectronics. ACKNOWLEDGMENTS This work was supported by the National Center for Nanomaterials Technology through Yeungnam University in 2009. |
| 저자 | 심람, Zhengbin Gu, 김동욱, 박진호 |
| 소속 | 영남대 |
| 키워드 | AAO template; ardered arrays |
| 원문파일 | 초록 보기 |
