화학공학소재연구정보센터
학회 한국재료학회
학술대회 2015년 봄 (05/14 ~ 05/15, 구미코)
권호 21권 1호
발표분야 G. 나노/박막 재료
제목 CVD-based MoS2 nanofilm for bi-functional sensor applications
초록   Atomic-scaled low dimensional (one or two dimensional) nano-materials have been attracting much interest as a strong candidate for diverse electronic and optoelectronic components. Recently, a variety of two dimensional (2D) transition metal dichalcogenides (TMDs) could enable superior detection capabilities of physical-chemical parameters due to unique physical properties including with high surface-to-volume ratio, sizable bandgaps, semiconducting property, and high absorption coefficient. In particular, many researchers have struggled to show the possibility of realizing high-performance gas molecule detection and photodetection in the 2D TMD materials. On the other hand, most of the relevant studies have primarily focused on potential single function sensor applications based on mechanically exfoliated MoS2 nanoflakes. 
  In this letter, we report on physical properties of chemical vapour deposition (CVD) synthesized MoS2 film on a wafer scale and its bi-functional sensing characteristics. First of all, it is demonstrated that the charge-transfer based MoS2 gas sensor[1] shows extremely low detection limit of sub ppm level, high selectivity, and stable cycling behaviour. Secondly, the MoS2 photosensor provides reasonable photoresponsivity (~71 mA/W), reliable photoresponse, and rapid photoswitching (< 500 ms). Finally, we have investigated the bi-functional sensing characteristics of the MoS2-based devices to detect both gas molecules and a light source in sequence. These multi-functional sensing characteristics of the atomic-layered MoS2 would also make attractive other 2D TMDs for futuristic sensor technologies.[2]

[1] Cho et al., Sci. Rep. 2015, 5, 8052
[2] Cho et al., ACS Appl. Mater. Interfaces, 2015, 7, 2952
저자 조병진, 함명관
소속 재료(연)
키워드 CVD; MoS<SUB>2</SUB>; bi-funtional sensor;
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