| 초록 |
Physical properties of composite thin films such as polymer/polymer or polymer/metal are necessary for 2D pattering. However, when the thickness is lower than 100nm, it is not applicable to measure it in the conventional measurement. Although estimation methods for physical properties of thin films such as surface wrinkling-based metrology have been investigated to measure the physical properties of thin films, these methods are applicable to only single materials. To address this challenge, we developed composite layer wrinkling-based metrology where physical properties of composite layers are measured. For presented method, analysis methods such as composite layer analysis and individual layer analysis were employed to measure the physical properties of homogeneous and heterogeneous composite layer respectively. Since this method can be applied to both homogeneous and heterogeneous cases, it is anticipated to be utilized to measurement of thin composite films. |
