| 학회 |
한국화학공학회 |
| 학술대회 |
2019년 가을 (10/23 ~ 10/25, 대전컨벤션센터) |
| 권호 |
25권 2호, p.1635 |
| 발표분야 |
에너지 환경 (Energy and Environment) |
| 제목 |
Preparation and characterization of a new solid electrolyte, LiSiON, deposited by RF sputtering |
| 초록 |
In thin study, we prepared and characterized LiSiON solid electrolyte by RF(radio frequency) sputtering. The surface morphologies and cross sectional view of thin films were characterized by FE-SEM(field-emission scanning electron microscopy). Compositions of thin films were characterized by XPS(X-ray photoelectron spectroscopy). Ionic conductivity of thin-film electrolyte was measured in Cu/electrolyte/Cu sandwich structures on sapphire substrate with overlap area of 0.16 cm2 by EIS(electrochemical impedance spectroscopy). Cu used as blocking electrode with thickness of 100nm was deposited by DC magnetron sputtering in Ar atmosphere and LiSiON as solid electrolyte with thickness of 1um was deposited by RF sputtering in Ar and N2 atmosphere. EIS was performed in frequency range from 0.1Hz to 1MHz, using 10mV ac signal at room temperatures. Ionic conductivity of LiSiON was 10-6 S/cm, which is similar to those of other oxide electrolytes. Therefore, LiSiON can be a promising electrolyte in all-solid-state thin film batteries. |
| 저자 |
나단, 이병준, 김영범, 윤백상, 서인석
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| 소속 |
전북대 |
| 키워드 |
에너지 환경 |
| E-Mail |
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| 원문파일 |
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