화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2009년 가을 (10/08 ~ 10/09, 광주과학기술원 오룡관)
권호 34권 2호
발표분야 기능성 고분자
제목 SiO2 Nanodot Arrays by Selective Adsorption on Functionalized Block Copolymer Templates
초록 The inherent variety of block copolymers makes their self-assembly an attractive means of creating such surfaces and they have been used as effective and versatile templates for many inorganic materials. Silicon oxide (SiO2) in particular has demonstrated tremendous promise in applications ranging from microelectronics to photonic devices. SiO2 nanodot arrays were fabricated by a selective interaction with functionalized block copolymer templates. A poly(styrene-b-acrylic acid/acrylic anhydride) (PS-b-PAA/PAN) thin film containing spherical nanodomains was used as a template to build nanoscopic silica structures. A PS-b-PAA/PAN thin film was prepared by the acid-catalyzed thermal deprotection of poly(styrene-b-tert-butyl acrylate) on an SU-8 resist containing photoacid generators. Aminopropyl-terminated PDMS was selectively adsorbed on carboxylic acid groups in spherical domains of PAA/PAN. SiO2 nanodot arrays were generated via calcination.
저자 김수민, 구세진, 김진백
소속 한국과학기술원
키워드 silicon oxide; functionalized block copolymer; PDMS
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