| 학회 |
한국화학공학회 |
| 학술대회 |
2013년 가을 (10/23 ~ 10/25, 대구 EXCO) |
| 권호 |
19권 2호, p.1234 |
| 발표분야 |
공업화학 |
| 제목 |
Preparation of V-Cr-Y thin film deposited on Ni substrate by RF sputtering |
| 초록 |
Membrane separation is one method of separating hydrogen and carbon dioxide converted from the WGS reaction for the purpose of capturing pre-combustion carbon dioxide. If it is possible to capture more than 99.9% of hydrogen and 90% of carbon dioxide using hydrogen separation membrane made of vanadium based components, 10 times more economic efficiency can be achieved compared to using the original, Pd-based membrane. It is confirmed in precedent studies that V-Cr-Y alloy shows high hydrogen permeability and selectivity. In this study, thin film was prepared by sputtering to increase the permeation flux of V-Cr-Y, and their structures under various conditions were studied. Three-components thin film was deposited on Nickel substrate using a alloy target set to 89.8%, 10.0%, 0.2% of V-Cr-Y respectively. The experiment was carried out under various condition to find the optimal thin film growth condition. The made thin film at optimal condition was annealed at 550℃and in H2, Ar gas atmosphere. The pillar shaped thin film was densified through heat treatment. The components and morphology of thin film according to various conditions were confirmed by EDS, SEM analysis. |
| 저자 |
윤용호1, 이병곤1, 김현동1, 박정훈2, 정지훈1
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| 소속 |
1경기대, 2동국대 |
| 키워드 |
Sputtering; Hydrogen membrane
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| E-Mail |
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| 원문파일 |
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