| 학회 |
한국고분자학회 |
| 학술대회 |
2016년 봄 (04/06 ~ 04/08, 대전컨벤션센터) |
| 권호 |
41권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Preparation of graphitic carbon films from SU-8 photoresist by ion beam irradiation and pyrolysis |
| 초록 |
Graphitic carbon films were prepared from SU-8 photoresist by ion beam irradiation followed by pyrolysis. SU-8 thin films spin-coated on a substrate were irradiated with proton ions at various fluences. The irradiated SU-8 films were pyrolyzed in a tube furnace under inert atmosphere. The final graphitic carbon films were characterized by using UV-vis, Raman, XPS, XRD, and 4-point probe conductivity meter. |
| 저자 |
정진묵1, 이장용1, 남희균1, 황인태2, 정찬희2, 신준화2, 최재학1
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| 소속 |
1충남대, 2한국원자력(연) |
| 키워드 |
Graphitic carbon; ion beam irradiation; photoresist
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| E-Mail |
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