| 학회 | 한국재료학회 |
| 학술대회 | 2012년 가을 (11/07 ~ 11/09, 라카이샌드파인 리조트) |
| 권호 | 18권 2호 |
| 발표분야 | B. 나노재료(Nanomaterials) |
| 제목 | Application of Electrostatic Ion Beam Accelerator |
| 초록 | Among the accelerator facilities in Korea, electrostatic ion beam application and facility status is presented. Electrostatic accelerators are able to produce a variety of ion beams from H to U in the energy range 20 keV upto tens of MeV. These ion beam can used for material analysis and modification. Backscattering spectrometry/Channeling (BS/Channeling), elastic recoil detection, nuclear reaction analysis (NRA), and particle induced x-ray emission (PIXE) are used for the determination of material composition in a quantitative manner and crystalinity in conjunction with microprobe techniques. Accelerator mass spectrometry(AMS) is a highly sensitive technique for measuring long-lived radionuclides of a small amount of samples(less than 1 mg). AMS is used for dating and identifying trace elements in numerous research fields such as environmental science, biology, and archaeology. Ion irradiation or implantation modify electrical, optical, magnetic, mechanical properties of materials. Ion beam material modification studies include: (a) optical property modification: quantum-well intermixing, luminescence from nano-crystal in silica, (b) magnetic property modification: easy axis control and patterning, ferromagnetism of Cu-implanted GaN(and ZnO), (c) smart cut process (d) maskless lithography by proton beam writing. Finally, current status and future plans of KIST ion beam cluster( 6MV, 2 MV, 400 kV) facility is shortly introduced. |
| 저자 | 송종한, 유병용, 김준곤 |
| 소속 | 한국과학기술(연) |
| 키워드 | Electrostatic Ion Beam Accelerator |
