| 초록 |
Polymethylsilsesquioxane (PMSSQ) was widely studied as a low-dielectric material. Moreover, copolymers of methyltrimethoxysilane (MTMS) with 1,2-bis(triethoxysilyl)ethane (BTESE), which has an ethylene bridging group as the comonomer, exhibits significantly better mechanical properties such as modulus and hardness than those of PMSSQ. So, in this study we investigated the effect of bridge length and structure of commoner on PMSSQ/Bridged silsesquioxanes (BSSQs) copolymers (bridging group: propylene, cyclopropylene). The microstructures of these BSSQs were analyzed by using graphite plate laser desorption/ionization time-of-flight mass spectrometry (GPLDI-TOF MS) and further characterized by thermogravimetric analysis (TGA), 29Si-NMR. And thin films were characterized by Fourier transform infrared spectroscopy (FT-IR), X-ray reflectivity porosimetry (XRP) and nanoindentor. The result shows that the stable cyclic structures of SSQ can be incorporated into polymer and remain in the film after curing at 430 oC. |
