| 초록 |
Monolayer films of diblock copolymer micelles can be fabricated by simple spin coating, which have self-assembled structures in the nanometer scale. In this study, we utilized the nanopattern of diblock copolymer micelles to fabricate nanopatterned inorganic materials (e.g. quantum dots) on the substrate. Inorganic compounds such FeCl3 and ZnCl2 were selectively loaded to the core block of copolymer micelles. Then, micellar monolayer films containing inorganic compounds were deposited on the substrate by spin coating. Since the inorganic core of micelles can provide large etching contrasts, nanopatterned inorganic materials were generated by etching with plasma gases such as O2 and CF4.
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