| 학회 |
한국재료학회 |
| 학술대회 |
2016년 가을 (11/16 ~ 11/18, 경주 현대호텔) |
| 권호 |
22권 2호 |
| 발표분야 |
E. 환경/센서 재료 분과 |
| 제목 |
Fabrication of MEMS hydrogen sensor with nanoporous AU@CNT system |
| 초록 |
A micro hydrogen gas sensor was formulated by using a microelectromechanical system (MEMS). The fabrication of MEMS microheater is the crucial component for the evolution of a low power gas sensor. The micro heater and sensing electrode were fabricate to have a co-planar structure with a Pt layer. The designed micro platform showed a low power consumption of 72mW at a 2.5 V heater voltage and operating temperature of 300°C. The dimensions of the micro hydogen gas sensor were approximately 1.8 x 1.8 mm. Nanoporous Au@CNT fims were synthesized by dealloying using HNO3. The fim structural and morphological properties of the fims were characterized by raman spectroscopy and feild emission scanning electron microscopy, respectively. These fims were used for hydrogen detection by the microheater platform. The gas sensitivity was calculated using the formula, Rs=(Ra-Rg)/Ra x 100. The maxium gas sensitivity was measured at 3V was found to be 2.99%. The gas sensitivity showed the linear behavior with an increase in operating temperature. |
| 저자 |
Bharat Sharma1, Jung Sik Kim2
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| 소속 |
1Univ. of Seoul, 2Energy-environment system |
| 키워드 |
<P>Hydrogen sensing; <A href="mailto:Au@CNT">Au@CNT</A>; MEMS; microheater.</P>
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| E-Mail |
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