초록 |
Suitable glasses for laser micromaching using a Nd:YAG laser have been developed. Sm2O3 was batched with the silicate glass. These glasses were densified with HIP process and Nd:YAG laser(1064 nm) were induced to make a bump on the surface. After machining the irradiation region has a smooth surface. Glass properties were measured by Thermo-Mechanical Analysis (TMA), Differential Thermal Analysis (DTA). Optical properties of this glass doped Sm3+ were measured by spectrometer (Uv-Vis, NIR). To see the surface shape of the laser induced region, AFM was used. The irradiation area acts as a micro lenses. |