화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2008년 가을 (10/09 ~ 10/10, 일산킨텍스)
권호 33권 2호
발표분야 기능성 고분자
제목 Synthesis of Adamantane Substituted Poly(methyl methacrylate) for ArF Photoresist and 1D NOE/2D NOESY NMR Studies for Their Monomer Sequence Distribution
초록 We synthesized the adamantane substituted poly(methyl methacrylate) for ArF photoresist via free radical polymerization. The photoresists having various chemical and physical properties were obtained by changing the experimental factors such as temperatures, solvents, and monomer concentrations. Although the photoresists have the same monomer compositions and molecular weights, it is found that the relative NOE values are different depending on the polymerization conditions. Therefore, the qualitative and quantitative analyses about the monomer sequence distribution of photoresist were performed using intramolecular crosspeaks of 2-dimensional NOESY NMR spectra and relative difference value of 1-dimensional NOE NMR, respectively.
저자 차상호1, 손해성1, 이원기1, 이종찬1, 김영호2, 윤효진2, 김명선2, 백세경2, 유민자3, 이재우3, 김재현3
소속 1서울대, 2삼성전자(주), 3(주)동진쎄미켐
키워드 amphiphilic polymer; electric conductivity; gold; composites; nanonetworks
E-Mail