| 초록 |
We present the highly ordered array of vanadium dioxide (VO2) nanodots using nanoporous templates fabricated by block copolymers-based lithography. Thin layers of poly(vinyl alcohol) (PVA) and polystyrene-block-poly(2-vinyl pyridine) (S2VP) were subsequently prepared on a silicon and glass substrate by spin-coating method. Then, the S2VP thin film on the PVA layer was solvent-annealed in toluene vapor for its self-assembly, so that hexagonally packed P2VP cylinders oriented vertically to the surface were achieved. After surface reconstruction of the S2VP thin film in ethanol, the resulting film showed hexagonally packed nanoporous structures. Subsequently, the layer of VO2 was uniformly deposited on nanoporous templates using VO2 target with magnetron sputtering system. As the PVA templates were removed by washing with water. only hexagonal array of VO2 dots was remained. The electrical properties of these VO2 dots were characterized at various temperatures. |
