학회 | 한국화학공학회 |
학술대회 | 2014년 가을 (10/22 ~ 10/24, 대전 DCC) |
권호 | 20권 2호, p.1872 |
발표분야 | 이동현상 |
제목 | Analysis of slot coating flow under tilted die; Frequency response analysis |
초록 | Slot coating is a high precision film processing method. Thickness is determined by controlling the flow rate fed to the die and the substrate speed. The range of desirable operating conditions for uniform coating is limited by shape and location of upstream and downstream menisci, which are controlled by the pressure gradient inside the coating flow. One way to adjust such pressure gradient can be done by choosing shape or orientation of slot die. In this study, we are focusing on the effect of such die configuration on the wet film uniformity under external disturbances via a numerical method so called a frequency response analysis. Here, we performed the frequency response analysis on the coating flows under tilted die. In terms of maximum and minimum gap heights, the configuration is similar to underbite and overbite configurations, but the thickness variations in response to the on-going disturbances are different due to the channels from sloped die lips due to tilting. Coating flows under the tilted configuration are analyzed by the Galerkin/finite element method. We focused on two types of disturbances: flow rate and gap oscillations. The results shows that die lip configurations have impacts in determining the thickness uniformity under periodic disturbances. |
저자 | 이세미, 남재욱 |
소속 | 성균관대 |
키워드 | Slot coating; Frequency response analysis; Free surface flow; Galerkin/finite element method |
VOD | VOD 보기 |
원문파일 | 초록 보기 |