학회 |
한국재료학회 |
학술대회 |
2015년 봄 (05/14 ~ 05/15, 구미코) |
권호 |
21권 1호 |
발표분야 |
E. 환경/센서 재료 |
제목 |
Near Single Crystalline TiO2 Nanohelices Array: Enhanced Gas Sensing Performances and its Application as Monolithically Integrated Electronic Noses |
초록 |
High performance gas sensors based on an array of near single crystalline TiO2 nanohelices fabricated by rotating oblique angle deposition (OAD) are presented. The combination of large surface-to-volume ratio, extremely small size (< 30 nm) comparable to the Debye length, high crystallinity of TiO2 nanohelices, together with the unique top-and-bottom electrodes configuration hugely improves the H2-sensing performance, including ~10 times higher sensitivity, ~a factor of 5 lower detection limit, and much faster response time than the conventional TiO2 thin film devices. Beyond such remarkable performance enhancement, the excellent compatibility of the OAD method with conventional micro-fabrication technology opens new avenue for monolithic integration of high-performing chemoresistive sensors to fabricate a simple, low cost, reliable, yet fully functional electronic nose and multi-functional smart chips for in-situ environmental monitoring. |
저자 |
황선용1, 권현아1, Sameer Chhajed1, 변지원2, 백정민2, 임지성1, 오상호1, 장호원3, 윤석진4, 김종규1
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소속 |
1포항공과대, 2울산과학기술대, 3서울대, 4KIST |
키워드 |
<P>Gas sensor; Electronic-nose</P>
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E-Mail |
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