화학공학소재연구정보센터
학회 한국재료학회
학술대회 2015년 봄 (05/14 ~ 05/15, 구미코)
권호 21권 1호
발표분야 E. 환경/센서 재료
제목 Near Single Crystalline TiO2 Nanohelices Array: Enhanced Gas Sensing Performances and its Application as Monolithically Integrated Electronic Noses
초록   High performance gas sensors based on an array of near single crystalline TiO2 nanohelices fabricated by rotating oblique angle deposition (OAD) are presented. The combination of large surface-to-volume ratio, extremely small size (< 30 nm) comparable to the Debye length, high crystallinity of TiO2 nanohelices, together with the unique top-and-bottom electrodes configuration hugely improves the H2-sensing performance, including ~10 times higher sensitivity, ~a factor of 5 lower detection limit, and much faster response time than the conventional TiO2 thin film devices. Beyond such remarkable performance enhancement, the excellent compatibility of the OAD method with conventional micro-fabrication technology opens new avenue for monolithic integration of high-performing chemoresistive sensors to fabricate a simple, low cost, reliable, yet fully functional electronic nose and multi-functional smart chips for in-situ environmental monitoring.
저자 황선용1, 권현아1, Sameer Chhajed1, 변지원2, 백정민2, 임지성1, 오상호1, 장호원3, 윤석진4, 김종규1
소속 1포항공과대, 2울산과학기술대, 3서울대, 4KIST
키워드 <P>Gas sensor; Electronic-nose</P>
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