| 초록 |
For flexible thin film transistor(TFT), flexible dielectric material is the important points. But oxide based dielectrics such as SiOx, AlOx have several limitations. These are generally brittle and need high temperature process isn’t good for flexible polymer substrates. One of these alternatives, organic thin film transistor(OTFT), has a number of disadvantages in terms of efficiency, including poor mobility. In this study, We use four types of poly(p-xylylene)(PPx, commercialized name is parylene) as a gate dielectric in a-IGZO TFT. The PPx has a lot of advantages such as pin-hole free structure, low temperature process, easy thickness control in flexible TFTs. Dielectric constants of PPx are 2.94(PPx-C), 2.60(PPx-D), 2.95(PPx-AF4), 3.41(PPx-Ethynyl) at 100kHz. Mobility of fabricated TFTs with PPxs is as high as 22.72 cm2/Vs. The most critical aspect is that it exhibited excellent durability over 10,000 bending cycles. |
