| 학회 |
한국공업화학회 |
| 학술대회 |
2017년 봄 (05/10 ~ 05/12, 광주 김대중컨벤센센터(Kimdaejung Convention Center)) |
| 권호 |
21권 1호 |
| 발표분야 |
디스플레이 |
| 제목 |
Barrier Property Enhancement by Organic-Inorganic Hybrid Processes |
| 초록 |
For flexible display applications, flexibility and barrier properties to water vapor and oxygen transport are highly required for plastic substrates. Inorganic barrier deposited by plasma enhanced atomic layer deposition (PEALD) process enhanced the barrier properties to some extent, but further improvements require less tact time and cost. It is expected that organic top coating of nanomaterials with high aspect ratio could improve the barrier properties of the inorganic layer formed by PEALD process. Organic top coating could also solve the problems in brittle nature of inorganic layers and protect the inorganic layer during the handling processes afterwards. High degree of encapsulation and flexibility by forming organic-inorganic hybrid layers were attempted in this work by employing combination of Al2O3/ZrO2 deposition PEALD process followed by organic top coating process with zirconium phosphate nanomaterial with high aspect ratios. |
| 저자 |
은지혜1, 김현기2, 김성수1
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| 소속 |
1경희대, 2디스플레이부품소재지역혁신센터 |
| 키워드 |
Barrier; PEALD; Top coating; WVTR; Flexibility
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| E-Mail |
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