| 초록 |
Study of Positive-tone High Temperature Photo-resist 김준표, 이승우†, 이명준, 석웅철, 유은주 영남대학교 Photosensitive polyimides (PSPI) have been studied to replace conventional polyimides since non-PSPI could reduce the number of processing steps in semiconductor packing by removing the photoresist related processes. Polyimides have been widely used as buffer layers and dielectric layers for semiconductor devices because of their excellent properties such as high thermal stabilities, chemical resistance and good mechanical properties. |
