화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2006년 봄 (04/06 ~ 04/07, 일산킨텍스)
권호 31권 1호
발표분야 고분자 구조 및 물성
제목 Kinetics of Cationic Photopolymerizations of UV-curable Epoxy-based Negative Photoresists With and Without Silica Nanoparticles
초록 Photocuring kinetics of protonic-acid-initiated cationic polymerizations of UV-curable epoxy-based negative photoresist systems with and without silica nanoparticles were assessed using photodifferential scanning calorimetry(Photo-DSC) and FTIR spectroscopy. Photo-DSC analysis using an autocatalytic kinetics model demonstrated that the cross-link density and cure rate increased as the concentration of silica nanoparticles with surface silanol groups increased to 2.5 wt%. This result was confirmed by FTIR spectroscopy, and suggests that the presence of silica nanoparticles at up to 2.5 wt% promoted the cure conversion and cure rate of the UV-curable hybrid organic–inorganic negative photoresists due to the synergistic effect of silica nanoparticles acting both as an effective flow or diffusion-aid agent and as a proton-donor cocatalyst during the cationic photopolymerization process.
저자 주형태1, 조정대2, 한승택1, 이상섭1, 홍진후1
소속 1조선대, 2한국광기술원
키워드 photocuring kinetics; cationic photopolymerization; negative photoresist; silica nanoparticles; photo-DSC
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