화학공학소재연구정보센터
학회 한국재료학회
학술대회 2018년 봄 (05/16 ~ 05/18, 삼척 쏠비치 호텔&리조트)
권호 24권 1호
발표분야 G. 나노/박막 재료 분과
제목 Residue-free fabrication of suspended MoS2 nanosheets using a PMMA transfer method
초록 Molybdenum disulphide (MoS2) in a two-dimensional form has attracted attention in recent years for nanoelectronic applications. Especially a single layer MoS2 shows significant potential as a semiconductor which is analogue to graphene. The reliability of this material is important to commercialize it in various industrial sectors by understanding the deformation behavior, mechanical properties and interfacial characteristics. Due to atomically thin geometry of this material, it poses a critical challenge in accurate experimental measurement. Although a few experimental methods have been developed by combining mechanical testing system, atomic force microscopy and Raman spectroscopy, they still suffer from certain drawbacks with the reliability of measurement results. Here, we report a method to fabricate suspended MoS2 nanosheets for a tensile test that is the most reliable testing method and can provide a simple but precise interpretation of the measurement result without using any assumptions. A poly-methyl methacrylate (PMMA) assisted wet transfer method was developed to transfer a MoS2 flake onto a tensile apparatus and the transferred flake was clamped by hardening the PMMA via an e-beam lithography. Our method provided a clean, reliable, and controllable way of fabricating micrometer-sized suspended MoS2 nanosheets. We further demonstrated the validity of the developed method by conducting tensile tests inside a transmission electron microscope.
저자 라케쉬 사르비드레1, 이창준2, 프라샨트 나루테2, 홍성구2, 김택남1
소속 1배재대, 2한국표준과학(연)
키워드 suspended MoS<SUB>2</SUB> nanosheet; PMMA hardening; In-situ tensile test
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