화학공학소재연구정보센터
학회 한국재료학회
학술대회 2016년 가을 (11/16 ~ 11/18, 경주 현대호텔)
권호 22권 2호
발표분야 E. 환경/센서 재료 분과
제목 Fabrication of highly conductive fiber by low-temperature atomic layer deposition of Pt for textile electronics
초록 Electronic textile (E-textile) where several electronic elements are integrated into fabrics have attracted a lot of interests as an advanced wearable electronics in future. To achieve the electronic textile, highly conductive fibers which overcome the drawbacks of previous conductive fiber should be fundamentally developed as an interconnect material. To fabricate the conductive fibers with high performances, various methods such as dip-coating process of carbon-based materials, electro- and electroless-plating process, and chemical reduction process have been widely investigated. However, it is difficult to obtain a high electrical performance and stability against repeated stimulations at the same time with the previous conductive fibers.
In this research, we describe a highly conductive fibers fabricated by an effective Pt ALD process which can be achieved at temperatures as low as 80 oC and the conductive fiber-based textile pressure sensorwith high sensitivity, fast response, and high stability. The low-temperature Pt ALD can be achieved using [(1,2,5,6-)-1,5-hexadiene]dimethylplatinum(II) (HDMP) precursors even with a stable counter reactant of O2 due to the superb reactivity of the precursors. Based on the low-temperature Pt ALD, uniform Pt film was successfully deposited onto the surface of the thermally weak substrates such as papers, cotton fibers. The conductive cotton fibers exhibited excellent electrical conductivity and high stability simultaneously. A capacitive textile pressure sensor with a high sensitivity, stability, and an extremely low detection limit was also fabricated using the conductive cotton fibers.
저자 이재홍1, 윤재홍1, 강수빈1, 김형준1, 이태윤1, 이한보람2
소속 1연세대, 2인천대
키워드 conductive fiber; textile electronics; atomic layer deposition; textile pressure sensor; low-temperature deposition
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