| 초록 |
Poly-3,4-ethylenedioxythiophene (PEDOT) is a very versatile and highly conductive polymer reported up to 3,500 S/cm so far. In this study, PEDOT with an ultra-high conductivity of about 1.9×106 S/cm and an ultra-thin film of about 35 nm is presented. The PEDOT was processed via an oxidative chemical vapor phase polymerization method (VPP) [1~3]. Thermally oxidized Si-wafer surface was covered with ferric chloride (FeCl3) oxidizing agent mixed with polyurethane diol and poly(ethylene glycol–propylene glycol–ethylene glycol) (PEG-PPG-PEG) prior to the exposure of 3,4-ethylenedioxythiophene (EDOT) vapors. Optical microscope images show that the precursor film (oxidant mixture) covered on wafer has very smooth and uniform surface. FE-SEM and AFM results revealed that PEDOT film after washing with n-butanol is very smooth, thin, and homogeneous (RMS is lower than 3nm). Ultra-thin PEDOT film was further characterized by various other tools such as XRD, FT-IR, EPR, TGA, and so on. All other results obtained by various analyzing tools strongly support that PEDOT is indeed an ultra highly conductive film like metal such as aluminum. |
