| 학회 | 한국공업화학회 |
| 학술대회 | 2020년 가을 (10/28 ~ 10/30, 광주 김대중컨벤션센터(Kimdaejung Convention Center)) |
| 권호 | 24권 1호 |
| 발표분야 | [나노] 나노 매뉴팩쳐링 기술과 공업화학 |
| 제목 | Vapor-phase deposition of organic/inorganic hybrid layers and their applications |
| 초록 | Organic−inorganic hybrid dielectrics have attracted considerable attention for improving both the dielectric constant (k) and mechanical flexibility of the gate dielectric layer for emerging flexible and wearable electronics. However, conventional solution-based hybrid materials, such as nanocomposite and self-assembled nanodielectrics, have limitations in the dielectric quality when the thickness is deep-scaled, which is critical to realizing high-performance flexible devices. This study proposes a novel vapor-phase synthesis method to form an ultrathin, homogeneous, high-k organic−inorganic hybrid dielectric. A series of hybrid dielectrics is synthesized via initiated chemical vapor deposition (iCVD) in a one-step manner. The hybrid dielectric synthesized via the iCVD process is a promising candidate for high-performance, low-power flexible electronics. |
| 저자 | 임성갑 |
| 소속 | KAIST |
| 키워드 | high-k dielectric; flexible electronics; initiated chemical vapor deposition; organic thin-film transistor |
