화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2015년 봄 (04/29 ~ 05/01, BEXCO (부산))
권호 19권 1호
발표분야 콜로이드계면화학_포스터
제목 식물성 오일 유래 친환경 실리콘 웨이퍼 세정제의 합성 및 물성 평가
초록 Silicon wafer contamination is a critical issue in solar cell texturing process. In this study, a novel nonionic surfactant was developed for water-based cleaner formulations in silicon solar cell manufacturing process.
The structure of the resulting product was elucidated by FT-IR, 1H NMR, and 13C NMR spectroscopies and basic characteristics of SWA 1503 including biodegradability, surface tension, emulsification activity, viscosity and foam property have been examined. And physical property and cleaning ability of the water based cleaner using SWA 1503 surfactant have been evaluated.
저자 김도원1, 조서연1, 이수민1, 이주연1, 손종석1, 임종주1, 이명진2
소속 1동국대, 2WizChem
키워드 silicon wafer; wafer cleaner; nonionic surfactant
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