| 학회 |
한국화학공학회 |
| 학술대회 |
2005년 가을 (10/21 ~ 10/22, 인하대학교) |
| 권호 |
11권 2호, p.2246 |
| 발표분야 |
에너지/환경 |
| 제목 |
A Research on Properties of Solubility for Chemicals in Supercritical Carbon Dioxide |
| 초록 |
The chemicals are compounds that were used in mixture for semiconductor wafer cleaning. The concentrations were determined in the temperature and pressure ranges from 323.15 K to 343.15 K and 9 MPa to 30 MPa. Solubility data of chemicals in supercritical carbon dioxide were correlated in terms of the density (g/cm3) of carbon dioxide using an empirical equation of Bartle et al. The resulting saturated solubility data points of chemicals in supercritical carbon dioxide were correlated. |
| 저자 |
이선진, 임종성, 유기풍
|
| 소속 |
서강대 |
| 키워드 |
solubility |
| E-Mail |
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| 원문파일 |
초록 보기 |
